Comprehensive solutions for waste gas and water treatment in the semiconductor industry
At DAS, we have been experts in point-of-use abatement technology for over 30 years. Our customers value both our extensive know-how in the abatement of process waste gases and our expertise in the entire field of water treatment.
Protection for people, the environment and production – with point-of-use waste gas treatment from DAS.
In high-tech semiconductor production, numerous processes – such as wafer cleaning, etching, CVD and epitaxy – generate process exhaust gases and wastewater containing environmentally relevant and safety-critical substances. Many of these gases are toxic, flammable or act as greenhouse gases. If they are fed into central exhaust gas systems without being filtered, there is a risk of deposits, explosive mixtures and production downtime.
DAS Environmental Experts offers tailor-made, safe and efficient solutions for this: our point-of-use waste gas treatment systems – such as burner/scrubber systems, scrubbers and electrostatic filters – remove pollutants directly at the point of origin.
The result is a particle-free, harmless gas mixture that can be safely discharged via the exhaust air. In addition, we take care of the treatment of liquids produced during the process, ensuring a consistent, safe disposal concept.
In the field of water and wastewater treatment, we develop individual concepts for the semiconductor industry – from the modernisation of existing systems to turnkey new plants. Our experts plan, build and operate point-of-use, semi-centralised and centralised plants that are precisely tailored to the requirements of your production. With over 15 years of experience in the construction of industrial wastewater treatment plants worldwide, we have a broad portfolio of biological and chemical-physical processes that reliably reduce pollutants below the legal limits. All systems are modular in design, ready to connect and meet the highest standards of purity, safety and reliability – so that high-tech production and environmental protection go hand in hand in your factory.
Flexible Point-Of-Use Solutions for Waste Gas Treatment
Waste Gas Treatment
Since 1991 the POU equipment, developed and manufactured by DAS Environmental Experts, has mastered the task. DAS equipment can be used for practically all modern coating and etching equipment of the chip industry. Waste gases are treated safely and in an environmentally compatible way, with exhaust gases meeting the legal requirements. DAS technology is based on a flexible, integrated product concept. The smallest equipment fits into a closet of less than a 1 square meter footprint. DAS technology is fully automated and sensor-controlled and meets the highest certified safety standards.
Dangerous Process Gases Require modern Waste Gas Solutions
In the semiconductor industry various process gases are used. These gases can pose a risk to the production facility, employees and the environment if they are not treated in the right way. DAS solutions work efficiently, fully automated and sensor-controlled for the best abatement results.
From Wastewater Treatment to Ressource Recovery
In the semiconductor industry, waste water from various production and cleaning processes and subsequent waste gas treatment is generated. At DAS EE, we are specialists in the treatment of such wastewater. Whether you want to upgrade an existing wastewater treatment system or are planning a new plant, our experts will work with you to develop a customised solution that meets your needs and exceeds your expectations.
We take your specific requirements into account and offer centralized, semi-centralized, and point-of-use systems. This flexible approach allows us to tailor the technology, location, and system size to your needs. Thanks to the modular design of our system components, our DAS wastewater treatment systems can be delivered to your site largely prefabricated and easy to install—for fast, safe, and sustainable implementation.
Our portfolio for the semiconductor industry includes among others
Removal of organic contaminants, measured as chemical oxygen demand (COD) and biochemical oxygen demand (BOD), from wastewater
Removal of heavy metals or other toxic compounds
Treatment of chemical mechanical polishing/planarisation (CMP) waste water
Treatment of silicon waste
Treatment and polishing of waste water containing fluride and arsenic
Treatment of isopropyl alcohol (IPA) or other volatile
organic compounds (VOCs)Reuse of treated wastewater (water recycling)
Recovery and recycling of valuable metals from wastewater
Example of a Biologicial Wastewater Treatment Plant for Semiconductor Industry
Case Study
Semiconductor Manufacturers produce environmentally friendly through combined Waste Gas and Waste Water Treatment
Combined Waste Gas and Waste Water Treatment
For over 30 years, DAS Environmental Experts has been developing innovative systems that combine exhaust gas and wastewater treatment into a closed, sustainable process. Our technologies clean process exhaust gases directly at the point of origin, treat the resulting wastewater and enable its reuse. In this way, we make an important contribution to ecological sustainability in semiconductor production – from emission reduction to resource recovery.
PFAS – A Challenge for the Semiconductor Industry
DAS EE is developing advanced gas and water treatment solutions to support the industry in managing PFAS safely and sustainably.
Sustainable Development Goals
Your Contact for all Topics in the Field of the Semiconductor Industry
For customized systems for safe waste gas and wastewater treatment in semiconductor manufacturing.
General Manager DAS United States
