Our Scrubber Portfolio at a Glance
The compact wet scrubbers by DAS Environmental Experts are characterized by a high disposal efficiency and low investment cost. Operation costs can be optimised with a process tool interface.
AQUABATE – Waste Gas Treatment with Wet Scrubber
Based on wet scrubber technology, DAS Environmental Expert has developed the AQUABATE product line, which removes water-soluble pollutants from process waste gases at the point of use in a highly flexible and customised manner. The scrubbers operate efficiently, require little space and reduce operating costs.
SALIX – Wet Scrubbing of Waste Gases from Wet Bench Applications
The point-of-use wet scrubber concept for treating harmful gases from single wafer wet bench processes has been successfully implemented with SALIX and evaluated hundreds of times in the field. The system allows for greater flexibility in process changes and, compared to older concepts, saves floor space and clean room air.
