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",{"type":233,"marks":373,"value":374},[293],"AI 수요의 증가는 더욱 강력한 반도체에 대한 필요성을 높이고, 이는 다시 더욱 복잡한 제조 공정으로 이어져 반도체 팹에 새로운 요구사항을 제시하고 있습니다.",{"type":230,"children":376},[377],{"type":233,"value":378},"따라서 전력, 용수, 공정 가스, 폐가스 및 폐수 처리와 같은 유틸리티 인프라는 첨단 반도체 팹의 계획 및 운영에서 점점 더 중요한 요소가 되고 있습니다. 특히 아시아, 미국 및 유럽의 주요 산업 거점에서 자원 확보에 대한 제약이 커지면서 이러한 인프라의 중요성은 더욱 높아지고 있습니다.",[],{"type":255,"id":381,"anchor":94,"background":257,"ctaButton":382,"headline":390,"primaryButton":391,"semanticOfHeadline":347,"tagline":94,"text":399,"textSideBySide":325},"WeBSvufhSVCpTJchKuDaeg",{"value":383,"links":389},{"schema":225,"document":384},{"type":227,"children":385},[386],{"type":230,"children":387},[388],{"type":233,"value":94},[],"더욱 첨단화된 칩, 더욱 복잡해지는 제조 공정",{"value":392,"links":398},{"schema":225,"document":393},{"type":227,"children":394},[395],{"type":230,"children":396},[397],{"type":233,"value":94},[],[400],{"text":401,"textStyle":94},{"value":402,"links":427},{"schema":225,"document":403},{"type":227,"children":404},[405,409,413,420],{"type":230,"children":406},[407],{"type":233,"value":408},"반도체 제조는 이미 수백 개에 달하는 고도로 제어된 공정 단계로 이루어져 있습니다. 소자 구조가 더욱 정교해짐에 따라 제조 장비와 이를 지원하는 인프라에 요구되는 조건 또한 지속적으로 변화하고 있습니다.",{"type":230,"children":410},[411],{"type":233,"value":412},"Etching과 화학 기상 증착(CVD)을 비롯한 여러 핵심 공정에서는 웨이퍼 가공과 챔버 세정을 위해 불소계 특수가스를 사용합니다. 미국 환경보호청(EPA)은 특히 식각 및 챔버 세정에 반응성 불소계 화합물을 사용하는 반도체 제조 공정을 전자산업의 온실가스 보고 대상에 포함되는 배출원으로 명시하고 있습니다.",{"type":230,"children":414},[415,417],{"type":233,"value":416},"이러한 상황에서 팹 운영자는 공정 성능을 넘어 또 하나의 중요한 질문에 직면하게 됩니다. ",{"type":233,"marks":418,"value":419},[293],"이 과정에서 발생하는 폐가스 스트림을 어떻게 안정적이고 효율적으로 처리할 수 있을까요?",{"type":230,"children":421},[422,425],{"item":423,"type":424},"EfDyiIffRnGA-y_zpmLLIw","inlineItem",{"type":233,"value":426},"을 위한 환경 솔루션에 대해 자세히 알아보세요.",[428],{"type":429,"id":423,"name":430,"availableLocales":431,"localizedSlugs":432},"IndustryRecord","반도체 산업",[148,113,159,127,120,134,141],[433,435,437,438,439,440,441],{"locale":113,"value":434},"/branchen/halbleiterindustrie/",{"locale":148,"value":436},"/industries/semiconductor-industry/",{"locale":141,"value":436},{"locale":134,"value":436},{"locale":127,"value":436},{"locale":159,"value":436},{"locale":120,"value":436},{"type":443,"id":444,"anchor":94,"background":329,"testimonial":445},"TestimonialBlockRecord","IQvjL-v8QwioeavA-2UK6w",[446],{"id":447,"quote":448,"media":457,"nameContactPerson":469,"nameCompany":117},"Fgb8Cb6LT22DERVZ-lZNWQ",{"value":449,"links":456},{"schema":225,"document":450},{"type":227,"children":451},[452],{"type":230,"children":453},[454],{"type":233,"value":455},"“폐가스 처리 시스템의 지속가능성 성능은 전체적인 기후 영향을 기준으로 평가해야 합니다. CF₄와 같은 가스의 경우 DRE가 단 몇 퍼센트포인트만 향상되더라도 중요한 차이를 만들어냅니다. 99.9% 이상의 분해 효율을 달성하는 최신 Burn-Wet 기술은 잔류 온실가스 배출량을 크게 줄일 수 있으며, 천연가스를 사용함에도 불구하고 팹 전체의 탄소 배출 저감 전략에 긍정적으로 기여할 수 있습니다.”",[],{"id":458,"url":459,"alt":460,"responsiveImage":461},"F_YGvUrERV-SaTupj4As5A","https://www.datocms-assets.com/159774/1765548296-guy-davies.png","백발의 남성이 남색 정장과 흰 셔츠를 입고 밝은 배경 앞에서 미소 짓고 있다.",{"src":462,"srcSet":463,"width":464,"height":465,"aspectRatio":466,"alt":460,"title":8,"base64":467,"sizes":468,"webpSrcSet":463},"https://www.datocms-assets.com/159774/1765548296-guy-davies.png?fit=max&fm=webp&h=100&q=50&w=150","https://www.datocms-assets.com/159774/1765548296-guy-davies.png?dpr=0.5&fit=max&fm=webp&h=100&q=50&w=150 55w,https://www.datocms-assets.com/159774/1765548296-guy-davies.png?dpr=0.75&fit=max&fm=webp&h=100&q=50&w=150 83w,https://www.datocms-assets.com/159774/1765548296-guy-davies.png?fit=max&fm=webp&h=100&q=50&w=150 111w,https://www.datocms-assets.com/159774/1765548296-guy-davies.png?dpr=1.5&fit=max&fm=webp&h=100&q=50&w=150 167w,https://www.datocms-assets.com/159774/1765548296-guy-davies.png?dpr=2&fit=max&fm=webp&h=100&q=50&w=150 223w,https://www.datocms-assets.com/159774/1765548296-guy-davies.png?dpr=3&fit=max&fm=webp&h=100&q=50&w=150 334w,https://www.datocms-assets.com/159774/1765548296-guy-davies.png?dpr=4&fit=max&fm=webp&h=100&q=50&w=150 446w",111,100,1.1165006496318752,"data:image/jpeg;base64,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","(max-width: 111px) 100vw, 111px","Dr. Guy Davies, Chief Business Development Officer",{"type":255,"id":471,"anchor":94,"background":257,"ctaButton":472,"headline":480,"primaryButton":481,"semanticOfHeadline":275,"tagline":94,"text":489,"textSideBySide":169},"YLeeW7XZSIOfuRz0bAR1Xw",{"value":473,"links":479},{"schema":225,"document":474},{"type":227,"children":475},[476],{"type":230,"children":477},[478],{"type":233,"value":94},[],"반도체 팹의 온실가스 배출: 불소계 가스가 중요한 이유",{"value":482,"links":488},{"schema":225,"document":483},{"type":227,"children":484},[485],{"type":230,"children":486},[487],{"type":233,"value":94},[],[490],{"text":491,"textStyle":94},{"value":492,"links":518},{"schema":225,"document":493},{"type":227,"children":494},[495,499,503,507,512],{"type":230,"children":496},[497],{"type":233,"value":498},"CF₄, NF₃를 비롯한 불소계 온실가스는 기후변화 측면에서 특히 중요하게 다뤄지고 있습니다. 이러한 가스의 특성은 반도체 제조 공정에서 유용하게 활용되는 한편, 환경적인 측면에서는 상당한 과제를 야기합니다.",{"type":230,"children":500},[501],{"type":233,"value":502},"CF₄는 대표적인 예입니다. CF₄는 반도체 제조, 특히 플라즈마 기반 공정에서 사용됩니다. 동시에 높은 화학적 안정성으로 인해 대기 중에 장기간 잔류하며, 효과적으로 분해하기 위해서는 높은 수준의 기술이 요구됩니다.",{"type":230,"children":504},[505],{"type":233,"value":506},"반도체 생산량이 증가함에 따라 이제는 단순히 생산되는 칩의 수를 넘어, 생산 과정에서 발생하는 온실가스 배출을 얼마나 효과적으로 관리하고 저감할 수 있는지가 더욱 중요해지고 있습니다.",{"type":230,"children":508},[509],{"type":233,"marks":510,"value":511},[293],"Deep Dive: CF₄ 저감에서 99.9% 이상의 DRE가 중요한 이유는 무엇일까요?",{"type":230,"children":513},[514,516],{"type":233,"value":515},"높은 분해·제거 효율(DRE)​이 반도체 제조 과정에서 발생하는 온실가스 배출 저감에 어떤 영향을 미치는지 자세히 알아보세요. 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",{"type":233,"marks":749,"value":750},[293],"환경 기술은 Fab 및 공정 계획이 완료된 후 추가적으로 고려하는 요소가 아니라, 초기 계획 단계부터 함께 고려해야 하는 핵심 요소입니다.",[],{"type":255,"id":753,"anchor":94,"background":257,"ctaButton":754,"headline":762,"primaryButton":763,"semanticOfHeadline":275,"tagline":94,"text":771,"textSideBySide":169},"ZUPdsuitRcGlTa_R6xV7HA",{"value":755,"links":761},{"schema":225,"document":756},{"type":227,"children":757},[758],{"type":230,"children":759},[760],{"type":233,"value":94},[],"다음 과제: 환경 영향을 늘리지 않으면서 생산 확대하기",{"value":764,"links":770},{"schema":225,"document":765},{"type":227,"children":766},[767],{"type":230,"children":768},[769],{"type":233,"value":94},[],[772],{"text":773,"textStyle":94},{"value":774,"links":804},{"schema":225,"document":775},{"type":227,"children":776},[777,781,785,789,793,800],{"type":230,"children":778},[779],{"type":233,"value":780},"AI의 성장으로 인한 반도체 산업의 확대는 새로운 과제를 제시하고 있습니다. 반도체 산업은 더 많은 생산 능력을 확보해야 하는 동시에, 온실가스 배출 저감, 에너지 효율 향상 및 자원 절약​이라는 목표도 함께 달성해야 합니다.",{"type":230,"children":782},[783],{"type":233,"value":784},"기존 인프라를 생산량 증가에 비례하여 단순히 확대하는 것만으로는 가장 지속가능한 해결책이 되기 어렵습니다. 미래의 Fab에서는 환경 성과를 하나의 통합된 시스템 관점에서 고려해야 합니다.",{"type":230,"children":786},[787],{"item":788,"type":424},"Zaqb0RwWRfW_JCXMEjjKRg",{"type":230,"children":790},[791],{"type":233,"value":792},"\n고도화된 폐가스 저감 기술은 이러한 접근 방식의 중요한 요소 중 하나입니다. 이와 함께 용수 재활용 및 재이용, 에너지 회수, 지능형 시스템 제어, 효율적인 자원 활용 역시 중요한 요소입니다.",{"type":230,"children":794},[795,797],{"type":233,"value":796},"목표는 단순히 생산량을 늘리는 것이 아닙니다. ",{"type":233,"marks":798,"value":799},[293],"생산 단위당 환경 영향을 줄이면서 더 높은 생산성을 달성하는 것입니다.",{"type":230,"children":801},[802],{"type":233,"value":803},"이는 Fab의 성과를 평가하는 기준에도 변화를 가져옵니다. 앞으로는 생산 능력, 공정 안정성 및 환경 효율성을 함께 고려하는 것이 더욱 중요해질 것입니다.",[805],{"type":520,"id":788,"name":806,"availableLocales":807,"localizedSlugs":808},"Less Is More: 반도체 산업에서의 자원 효율적 활용",[148,113,159,127,120,134],[809,811,813,814,816,817],{"locale":113,"value":810},"/nachhaltige-innovationen/weniger-ist-mehr-effiziente-ressourcennutzung-in-der-halbleiterbranche/",{"locale":148,"value":812},"/sustainable-innovations/sustainability-in-chip-production/",{"locale":134,"value":812},{"locale":127,"value":815},"/sustainable-innovations/weniger-ist-mehr-effiziente-ressourcennutzung-in-der-halbleiterbranche/",{"locale":159,"value":812},{"locale":120,"value":812},{"type":327,"id":819,"anchor":94,"background":329,"headline":820,"semanticOfHeadline":275,"tagline":94,"text":821,"row":829},"OUVfloXVSRqx6gKKEAIpWQ","요약: AI 시대의 과제를 기술적 기회로 전환하기",{"value":822,"links":828},{"schema":225,"document":823},{"type":227,"children":824},[825],{"type":230,"children":826},[827],{"type":233,"value":94},[],[830],{"type":341,"id":831,"leftColumn":832,"rightColumn":848},"AuJ6uVO3SBu-wI3Y_1dIEw",[833],{"type":345,"id":834,"tagline":94,"headline":94,"semanticOfHeadline":347,"text":835},"KaoOPbogTsmf1GklSXsIKA",{"value":836,"links":847},{"schema":225,"document":837},{"type":227,"children":838},[839,843],{"type":230,"children":840},[841],{"type":233,"value":842},"AI는 반도체 산업의 발전을 더욱 가속화하고 있습니다. 동시에 제조 공정이 더욱 고도화됨에 따라, 반도체 생산을 지원하고 환경 영향을 줄이기 위한 시스템에 대한 요구 수준도 높아지고 있습니다.",{"type":230,"children":844},[845],{"type":233,"value":846},"Point-of-Use 폐가스 처리 기술을 비롯한 다양한 환경 기술은 이제 성능, 확장성 및 지속가능성을 모두 고려한 Fab 인프라의 핵심 요소​로 자리 잡고 있습니다.",[],[849],{"type":345,"id":850,"tagline":94,"headline":94,"semanticOfHeadline":851,"text":852},"eJy7UFcZRuGyAd7OQzb1VA","h4",{"value":853,"links":861},{"schema":225,"document":854},{"type":227,"children":855},[856],{"type":230,"children":857},[858],{"type":233,"marks":859,"value":860},[293],"이제 과제는 단순히 더 높은 성능의 반도체를 생산하는 것에 그치지 않습니다. 환경 영향을 줄이면서 책임감 있는 방식으로 반도체를 생산할 수 있도록 필요한 인프라를 구축하는 것 역시 중요한 과제입니다.",[],{"type":863,"id":864,"anchor":94,"headline":865,"semanticOfHeadline":347,"text":866,"contactPerson":880},"ContactPersonBlockRecord","eo8JEjaESaiGd7QwGpQjhw","귀사의 폐가스 처리 시스템은 차세대 공정에 준비되어 있습니까?",{"value":867,"links":879},{"schema":225,"document":868},{"type":227,"children":869},[870,874],{"type":230,"children":871},[872],{"type":233,"value":873},"새로운 공정, 생산 능력 확대 및 가스 조성의 변화는 Fab 인프라에 새로운 요구사항을 가져올 수 있습니다. 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