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제조 공정에서 발생하는 폐수는 일반적으로 다음 세 가지 주요 그룹으로 구분할 수 있습니다.",{"type":472,"style":473,"children":474},"list","bulleted",[475,482,488],{"type":476,"children":477},"listItem",[478],{"type":230,"children":479},[480],{"type":233,"value":481},"식각 및 세정 공정에서 발생하는 불소 함유 폐수",{"type":476,"children":483},[484],{"type":230,"children":485},[486],{"type":233,"value":487},"절단 및 연마 공정에서 발생하는 SiO₂ 및 알루미늄 입자 함유 폐수",{"type":476,"children":489},[490],{"type":230,"children":491},[492],{"type":233,"value":493},"다양한 제조 공정에서 발생하는 기타 산성 및 알칼리성 폐수",{"type":230,"children":495},[496],{"type":233,"value":497},"이처럼 다양한 폐수 스트림을 처리하기 위해서는 총부유물질(TSS)의 효과적인 제거, 선택적인 불소 분리 및 안정적인 pH 제어​가 중요합니다. 다음에서는 이러한 폐수 스트림을 대상으로 한 화학·물리적 처리 공정의 사례를 소개합니다.",[],[500],{"type":501,"id":502,"leftColumn":503,"middleColumn":533,"rightColumn":558},"ThreeFeatureColumnRecord","MvOweQiqTVOUIK_Mlul4lA",[504],{"type":337,"id":505,"tagline":94,"headline":506,"semanticOfHeadline":507,"text":508},"Uvj-xOTbQ5iRTZm2vgPCQw","불소 처리","h5",{"value":509,"links":532},{"schema":225,"document":510},{"type":227,"children":511},[512,516,520,524,528],{"type":230,"children":513},[514],{"type":233,"value":515},"불소를 함유한 폐수는 별도의 처리 라인을 통해 처리됩니다. 이 단계의 목적은 용존 불소를 안정적으로 침전시키고 제거하는 것입니다.",{"type":230,"children":517},[518],{"type":233,"value":519},"먼저 칼슘을 주입하여 불소를 난용성 불화칼슘(CaF₂) 형태로 침전시킵니다. 이후 가성소다를 첨가하여 침전이 최적의 pH 범위에서 이루어지도록 조절합니다.",{"type":230,"children":521},[522],{"type":233,"value":523},"다음 단계에서는 염화철(FeCl₃) 등을 이용한 응집이 진행됩니다. 응집제는 미세 입자를 불안정화하여 서로 뭉치도록 합니다. 이어지는 고분자 응집(플록 형성) 과정에서는 폴리머를 첨가하여 크기가 크고 쉽게 침전되는 플록을 형성합니다.",{"type":230,"children":525},[526],{"type":233,"value":527},"이후 라멜라 침전조(Lamella Clarifier)​에서 고액 분리가 이루어집니다. 라멜라 침전조는 넓은 유효 침전 면적을 확보할 수 있어 높은 분리 효율을 유지하면서도 설비를 컴팩트하게 구성할 수 있다는 장점이 있습니다.",{"type":230,"children":529},[530],{"type":233,"value":531},"처리된 상등수는 후속 중화 공정으로 이송되며, 생성된 슬러지는 저장 탱크에 모아 농축한 후 외부로 반출하여 처리 및 폐기합니다.",[],[534],{"type":337,"id":535,"tagline":94,"headline":536,"semanticOfHeadline":507,"text":537},"K2wk6qoOShG95BMBU038SA","실리콘 처리",{"value":538,"links":557},{"schema":225,"document":539},{"type":227,"children":540},[541,545,549,553],{"type":230,"children":542},[543],{"type":233,"value":544},"절단 및 연마 공정에서 발생하는 폐수 역시 별도의 처리 라인을 통해 처리됩니다. 이 폐수에는 주로 미세하게 분산된 이산화규소(SiO₂)와 알루미늄 입자​가 포함되어 있으며, 화학적 처리를 하지 않고는 침전시키기 어렵습니다.",{"type":230,"children":546},[547],{"type":233,"value":548},"처리는 응집 공정을 통해 이루어지며, 예를 들어 염화철(FeCl₃)을 사용하여 입자 표면의 전하를 중화하고 입자들이 서로 뭉쳐 플록을 형성하도록 합니다. 또한 수산화나트륨(NaOH)을 주입하여 응집에 최적화된 pH 범위로 조절합니다.",{"type":230,"children":550},[551],{"type":233,"value":552},"이후 폴리머 응집을 통해 안정적인 플록을 형성하고, 이를 라멜라 침전조(Lamella Clarifier)에서 효율적으로 분리합니다.",{"type":230,"children":554},[555],{"type":233,"value":556},"생성된 슬러지는 별도의 탱크에 임시 보관한 후 탈수 처리하고 외부로 반출하여 처리 및 폐기합니다.",[],[559],{"type":337,"id":560,"tagline":94,"headline":561,"semanticOfHeadline":507,"text":562},"LG4GLqsQRIOBTwRbQcfDZQ","중화 처리",{"value":563,"links":605},{"schema":225,"document":564},{"type":227,"children":565},[566,570,574,578,598,602],{"type":230,"children":567},[568],{"type":233,"value":569},"불소 처리 및 실리콘 처리 공정에서 처리된 폐수는 다단계 중화 시스템으로 함께 이송됩니다. 생산 공정에서 발생하는 추가적인 산성 및 알칼리성 폐수도 이 공정에 함께 유입되어 처리됩니다.",{"type":230,"children":571},[572],{"type":233,"value":573},"산성 폐수를 중화하기 위해 필요에 따라 수산화나트륨(NaOH)​을 주입하고, pH가 과도하게 높은 경우에는 염산(HCl)​을 주입하여 pH를 조절합니다. 다단계 설계를 통해 높은 수준의 제어 정밀도를 확보할 수 있으며, 유입되는 폐수의 성상과 유량 변동에도 효과적으로 대응할 수 있습니다.",{"type":230,"children":575},[576],{"type":233,"value":577},"안정적인 설비 운영과 방류 기준 준수를 위해 주요 수질 항목을 지속적으로 모니터링합니다. 주요 관리 항목은 다음과 같습니다.",{"type":472,"style":473,"children":579},[580,586,592],{"type":476,"children":581},[582],{"type":230,"children":583},[584],{"type":233,"value":585},"pH",{"type":476,"children":587},[588],{"type":230,"children":589},[590],{"type":233,"value":591},"총부유물질(TSS) 농도",{"type":476,"children":593},[594],{"type":230,"children":595},[596],{"type":233,"value":597},"불소 농도",{"type":230,"children":599},[600],{"type":233,"value":601},"이러한 항목은 공정 제어뿐만 아니라 법적 규제 요건 준수를 입증하기 위한 기록 관리에도 활용됩니다.",{"type":230,"children":603},[604],{"type":233,"value":94},[],{"type":254,"id":607,"anchor":94,"background":256,"ctaButton":608,"headline":616,"primaryButton":617,"semanticOfHeadline":507,"tagline":94,"text":625,"textSideBySide":301},"SZA8wZRTRUqUNtS7-33WPQ",{"value":609,"links":615},{"schema":225,"document":610},{"type":227,"children":611},[612],{"type":230,"children":613},[614],{"type":233,"value":94},[],"불소 침전 공정의 모니터링 및 제어",{"value":618,"links":624},{"schema":225,"document":619},{"type":227,"children":620},[621],{"type":230,"children":622},[623],{"type":233,"value":94},[],[626],{"text":627,"textStyle":94},{"value":628,"links":643},{"schema":225,"document":629},{"type":227,"children":630},[631,635,639],{"type":230,"children":632},[633],{"type":233,"value":634},"pH는 불소 침전 및 실리콘 입자의 응집 과정에서 결정적인 역할을 합니다. 용존 불소를 효과적으로 제거하기 위해 불소 처리 라인의 유입수와 처리수에서 불소 농도를 측정합니다.",{"type":230,"children":636},[637],{"type":233,"value":638},"또한 중화 공정의 처리수에서는 최종 pH, 불소 농도 및 총부유물질(TSS) 농도​를 측정합니다.",{"type":230,"children":640},[641],{"type":233,"value":642},"시스템의 물질수지 및 유량 균형을 관리하기 위해 모든 유입 라인과 중화 처리수 배출 라인에 유량 센서를 설치하여 유량을 모니터링합니다.",[],{"type":429,"id":645,"anchor":94,"background":256,"headline":646,"semanticOfHeadline":322,"tagline":94,"media":647},"NdWrvFbIQ9mqqLJDkUG-QQ","화학-물리적 처리 공정도",[648],{"type":434,"id":649,"hideMediaDescription":301,"mediaDescription":94,"image":650,"imageGradient":169},"ADxDzVelQVKarNZl7GsCPg",{"alt":651,"id":652,"title":646,"url":653,"responsiveImage":654},"반도체 폐수의 실리콘·불소 제거 및 pH 조절을 위한 화학·물리적 처리 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원리",{"value":666,"links":672},{"schema":225,"document":667},{"type":227,"children":668},[669],{"type":230,"children":670},[671],{"type":233,"value":94},[],[674],{"type":333,"id":675,"leftColumn":676,"rightColumn":700},"fSCyGRrrRFK85qUKQuxigA",[677],{"type":337,"id":678,"tagline":94,"headline":94,"semanticOfHeadline":322,"text":679},"fY_QH6duSxyN1_cs-jQpOw",{"value":680,"links":699},{"schema":225,"document":681},{"type":227,"children":682},[683,687,691,695],{"type":230,"children":684},[685],{"type":233,"value":686},"물 재이용의 목적은 담수 취수량을 줄이고, 폐수 방류를 최소화하며, 물 순환을 폐쇄형으로 전환하는 것​입니다. 물 재이용 시스템을 도입하는 주요 이유로는 물 부족 지역에서 외부 수원에 대한 의존도를 낮추고, 오염도가 낮은 물을 재이용하여 비용을 절감하며, 현장 처리를 통해 공급되는 담수의 수질을 안정적으로 관리할 수 있다는 점을 들 수 있습니다.",{"type":230,"children":688},[689],{"type":233,"value":690},"첫 번째 핵심 단계는 목표 수질을 설정하는 것입니다. 목표에 따라 처리수를 초순수(UPW) 시스템의 공급수로 재투입하거나, 상대적으로 수질 요구 수준이 낮은 용도에 사용할 수 있는 재이용수(RCW, Reclaimed Water)​로 처리할 수 있습니다. 일반적으로 RCW는 상대적으로 달성하기 쉬운 수질 기준을 적용할 수 있으며, 배기가스 처리, 냉각 시스템 또는 일부 유틸리티 공정과 같은 용도에 적합합니다.",{"type":230,"children":692},[693],{"type":233,"value":694},"많은 세정 공정에서는 오염도가 매우 낮은 폐수가 발생하기 때문에, 적절한 처리를 거친 후 이를 RCW로 직접 재이용할 수 있습니다. 일반적으로 처리 과정은 입자 제거부터 시작하며, 예를 들어 한외여과(UF, Ultrafiltration)​를 적용할 수 있습니다. 필요한 경우 응집 및 침전 공정을 선행한 후 역삼투(RO, Reverse Osmosis)를 적용하여 용존 물질을 추가로 제거합니다.",{"type":230,"children":696},[697],{"type":233,"value":698},"과산화수소와 같이 물에 포함된 산화제는 촉매를 이용하여 분해하거나, UV 기반 고도산화공정(AOP, Advanced Oxidation Process) 등을 통해 재이용할 수 있습니다.",[],[701],{"type":337,"id":702,"tagline":94,"headline":94,"semanticOfHeadline":322,"text":703},"IPciTazSQKatYMjgcJNrmQ",{"value":704,"links":723},{"schema":225,"document":705},{"type":227,"children":706},[707,711,715,719],{"type":230,"children":708},[709],{"type":233,"value":710},"대부분의 폐수는 우선 중화 처리를 거치며, HF, 고형물 또는 암모늄 등에 의해 오염된 폐수 스트림은 주요 오염물질을 효과적으로 처리할 수 있도록 별도의 전처리 공정을 적용합니다.",{"type":230,"children":712},[713],{"type":233,"value":714},"특히 초순수(UPW) 시스템은 대량의 물이 순환하기 때문에 물 재이용을 통한 절감 잠재력이 매우 높은 영역​입니다. 예를 들어 2단 RO(Two-pass RO) 또는 세정수 회수와 같은 방법은 비교적 적은 노력으로 높은 효과를 얻을 수 있는 대표적인 적용 사례입니다.",{"type":230,"children":716},[717],{"type":233,"value":718},"이와 같은 물 재이용 시스템에서도 중앙집중식 EOP(End-of-Pipe) 방식과 분산형 순환 시스템​을 구분할 수 있습니다. EOP 시스템에서는 MLD(Minimal Liquid Discharge, 최소 액체 방류)​와 ZLD(Zero Liquid Discharge, 무액체 방류)​로 구분할 수 있습니다. 이 중 ZLD는 처리수를 UPW 공급수로 재순환시키는 방식으로 가장 높은 수준의 물 재이용을 실현할 수 있는 방식이지만, 높은 초기 투자비와 운영비가 수반됩니다.",{"type":230,"children":720},[721],{"type":233,"value":722},"분산형 방식에서는 POU(Point-of-Use) 개념에 따라 배출가스 처리수나 백그라인딩 폐수와 같은 개별 폐수 스트림을 발생 지점에서 직접 처리합니다. 이를 통해 가치 있는 물질을 보다 높은 순도 또는 고농도로 회수할 수 있다는 장점이 있습니다.",[],{"type":319,"id":725,"anchor":94,"background":256,"headline":726,"semanticOfHeadline":322,"tagline":94,"text":727,"row":735},"Les1L8iUQ6SyD8p5h08z9w","반도체 공장의 물 재이용 시스템 통합",{"value":728,"links":734},{"schema":225,"document":729},{"type":227,"children":730},[731],{"type":230,"children":732},[733],{"type":233,"value":94},[],[736],{"type":333,"id":737,"leftColumn":738,"rightColumn":758},"GMksMSQDQK2KVpVxFD03rQ",[739],{"type":337,"id":740,"tagline":94,"headline":94,"semanticOfHeadline":322,"text":741},"OaOm0UjfSqiqaADa4d0lhw",{"value":742,"links":757},{"schema":225,"document":743},{"type":227,"children":744},[745,749,753],{"type":230,"children":746},[747],{"type":233,"value":748},"물 스트림을 대규모로 또는 완전히 회수하기 위한 시스템, 특히 ZLD(Zero Liquid Discharge, 무액체 방류) 시스템은 설치 공간, 에너지 공급 및 유틸리티 인프라에 높은 수준의 요구사항을 갖습니다. 이러한 시스템에는 대규모 설비와 증발 단계 및 농축 설비가 필요하기 때문에 일반적으로 ​신규 건설 프로젝트(Greenfield)에 적용되는 경우가 많습니다. 신규 공장에서는 추가로 필요한 에너지와 설치 공간을 고려하여 팹 전체의 인프라를 처음부터 설계할 수 있기 때문입니다.",{"type":230,"children":750},[751],{"type":233,"value":752},"반면 기존 공장에 시스템을 추가하는 개조 프로젝트(Brownfield)​는 제한된 설치 공간, 기존 배관 구조, 부족한 에너지 또는 냉각 용량 등의 제약으로 인해 일반적으로 매우 높은 수준의 추가 작업이 필요하며 적용이 쉽지 않습니다.",{"type":230,"children":754},[755],{"type":233,"value":756},"ZLD 원칙을 적용하지 않는 EOP(End-of-Pipe) 방식의 물 회수 시스템​은 훨씬 높은 유연성을 제공합니다. 중앙 중화 처리 이전에 적용되는 전처리의 수질 수준에 따라 기존 팹에도 이러한 시스템을 추가로 구축할 수 있습니다. 일반적으로 약 40~70%의 회수율을 달성할 수 있습니다. 이 경우 하수처리장으로 유입되는 오염물질의 총량은 크게 변하지 않지만, 폐수의 유량은 크게 감소합니다. 이를 통해 담수 사용량과 폐수 발생량을 모두 실질적으로 절감할 수 있습니다.",[],[759],{"type":337,"id":760,"tagline":94,"headline":94,"semanticOfHeadline":322,"text":761},"XlhzP5moQxy-w5rDSNNQxQ",{"value":762,"links":781},{"schema":225,"document":763},{"type":227,"children":764},[765,769,773,777],{"type":230,"children":766},[767],{"type":233,"value":768},"더욱 높은 수준의 모듈화가 가능한 방식으로 POU(Point-of-Use) 또는 Bay 솔루션, 즉 설치 면적이 작은 분산형 처리 시스템이 있습니다. 이러한 방식은 대규모 구조 변경 없이 기존 설비에 통합할 수 있기 때문에 Brownfield 환경에 특히 적합​합니다. 또한 명확하게 구분된 특정 공정 라인만 처리 대상이 됩니다.",{"type":230,"children":770},[771],{"type":233,"value":772},"중앙집중식 시스템은 처리수 1㎥당 필요한 공간과 에너지 측면에서 더 효율적이지만, 이를 적용하기 위해서는 그에 상응하는 설치 공간과 인프라가 확보되어야 합니다. 반면 분산형 솔루션은 물이 다양한 오염물질로 혼합 오염되기 전에 처리할 수 있기 때문에 수질 특성에 보다 정확하고 효율적으로 대응할 수 있습니다.",{"type":230,"children":774},[775],{"type":233,"value":776},"적합한 처리 공정을 선정하는 것뿐만 아니라 자동화, 온라인 수질 분석 및 유연한 운전 방식 역시 안정적이고 자원 효율적인 운영을 위해 중요합니다. 최신 모니터링 시스템은 주요 수질 지표를 지속적으로 측정하고, 부하 및 생산 제품의 변동에 따라 처리 조건을 동적으로 조정할 수 있도록 합니다.",{"type":230,"children":778},[779],{"type":233,"value":780},"또한 여기에는 클린룸의 공정 시스템과 그 하부에 위치한 Subfab의 후단 시스템 간 데이터 교환도 포함됩니다. 이러한 연계는 디지털 플랫폼과 네트워크 기반 제어 솔루션을 통해 지원되며, 전체 물 처리 시스템의 효율적인 운영과 관리를 가능하게 합니다.",[],{"type":303,"id":783,"image":784},"NZlwyRdoQ6aEArA3pvcxZA",{"alt":785,"id":786,"title":785,"url":787,"responsiveImage":788},"인포그래픽: 반도체 팹의 구조(단면도)","dSBeZez6Tmai-rPPeIWUkA","https://www.datocms-assets.com/159774/1778233776-das_infografik_aufbau-einer-halbleiterfab-im-querschnitt.png",{"src":789,"srcSet":790,"width":313,"height":314,"aspectRatio":315,"alt":785,"title":785,"base64":791,"sizes":317,"webpSrcSet":790},"https://www.datocms-assets.com/159774/1778233776-das_infografik_aufbau-einer-halbleiterfab-im-querschnitt.png?fit=crop&fm=webp&h=600&q=65&w=1600","https://www.datocms-assets.com/159774/1778233776-das_infografik_aufbau-einer-halbleiterfab-im-querschnitt.png?dpr=0.25&fit=crop&fm=webp&h=600&q=65&w=1600 400w,https://www.datocms-assets.com/159774/1778233776-das_infografik_aufbau-einer-halbleiterfab-im-querschnitt.png?dpr=0.5&fit=crop&fm=webp&h=600&q=65&w=1600 800w,https://www.datocms-assets.com/159774/1778233776-das_infografik_aufbau-einer-halbleiterfab-im-querschnitt.png?dpr=0.75&fit=crop&fm=webp&h=600&q=65&w=1600 1200w,https://www.datocms-assets.com/159774/1778233776-das_infografik_aufbau-einer-halbleiterfab-im-querschnitt.png?fit=crop&fm=webp&h=600&q=65&w=1600 1600w,https://www.datocms-assets.com/159774/1778233776-das_infografik_aufbau-einer-halbleiterfab-im-querschnitt.png?dpr=1.5&fit=crop&fm=webp&h=600&q=65&w=1600 2400w,https://www.datocms-assets.com/159774/1778233776-das_infografik_aufbau-einer-halbleiterfab-im-querschnitt.png?dpr=2&fit=crop&fm=webp&h=600&q=65&w=1600 3200w","data:image/png;base64,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",{"type":319,"id":793,"anchor":94,"background":371,"headline":794,"semanticOfHeadline":274,"tagline":94,"text":795,"row":803},"Pqhl99mfTe-C-BaOIMmjlg","사례 연구: 공장 내 통합 물 재이용 시스템(POU 방식)",{"value":796,"links":802},{"schema":225,"document":797},{"type":227,"children":798},[799],{"type":230,"children":800},[801],{"type":233,"value":94},[],[804],{"type":333,"id":805,"leftColumn":806,"rightColumn":834},"F-xJJXWnQme1InDpXs7Jew",[807],{"type":337,"id":808,"tagline":94,"headline":94,"semanticOfHeadline":322,"text":809},"Fvew64PKTw2crMyldgfNNA",{"value":810,"links":833},{"schema":225,"document":811},{"type":227,"children":812},[813,817,821,825,829],{"type":230,"children":814},[815],{"type":233,"value":816},"앞서 설명한 중앙집중식 폐수처리시설은 방류 기준을 안정적으로 준수할 수 있도록 해주지만, 생산량 증가, 공정 화학물질의 복잡성 증가 및 지속 가능성에 대한 요구가 높아짐에 따라 경제적·환경적 측면에서 점차 한계에 도달하고 있습니다. 특히 물 사용량이 많은 반도체 공장에서는 폐수를 공정의 마지막 단계에서 일괄적으로 처리하는 방식에서 벗어나, 폐수가 발생하는 지점에서부터 발생량을 최소화하거나 사전에 처리하는 방식으로 관심이 확대되고 있습니다.",{"type":230,"children":818},[819],{"type":233,"value":820},"이러한 기술의 주요 적용 분야 중 하나가 이른바 Subfab의 폐가스 처리 시스템입니다. 이 시스템은 공정에서 발생하는 배기가스를 정화하기 위한 설비로, 기체 상태의 오염물질을 연소시키거나 세정액으로 이동시켜 제거합니다. 이 과정에서 발생하는 폐수에는 입자(산화물), 불소, 산 또는 알칼리와 같은 특정 물질이 고농도로 포함되는 경우가 많습니다.",{"type":230,"children":822},[823],{"type":233,"value":824},"개별 폐가스 처리 시스템에서 발생하는 폐수량은 반도체 팹 전체의 물 사용량에 비해 적습니다. 그러나 하나의 반도체 팹에는 수백 개에서 많게는 수천 개의 폐가스 처리 설비가 설치될 수 있으며, 이로 인해 해당 설비에서 발생하는 폐수는 팹 전체 폐수 발생량의 약 25%를 차지할 수 있습니다.",{"type":230,"children":826},[827],{"type":233,"value":828},"POU(Point-of-Use) 방식​은 이러한 고농도 오염 폐수 스트림을 발생 지점에서 직접 처리하고, 이상적으로는 처리된 폐수를 다시 폐가스 처리 시스템으로 회수하여 재이용하는 것을 목표로 합니다.",{"type":230,"children":830},[831],{"type":233,"value":832},"이를 통해 폐가스 처리 시스템의 담수 사용량을 최소화하는 동시에, 반도체 팹의 중앙 폐수처리시설에 유입되는 수리학적 부하도 줄일 수 있습니다.",[],[835],{"type":337,"id":836,"tagline":94,"headline":94,"semanticOfHeadline":322,"text":837},"Cynokc0AQluuDSg-qPtf9Q",{"value":838,"links":861},{"schema":225,"document":839},{"type":227,"children":840},[841,845,849,853,857],{"type":230,"children":842},[843],{"type":233,"value":844},"폐수의 성상은 폐가스 처리 시스템의 종류와 상류 공정 장비에 따라 달라집니다. Pure Scrubber에서는 주로 이소프로판올(IPA), 불산(HF), 염산(HCl), 용존 염류 및 암모니아와 같은 오염물질이 포함됩니다.",{"type":230,"children":846},[847],{"type":233,"value":848},"Burn-Wet 시스템​에서는 불소, 비소, 인, 붕소 등을 포함한 용존 염류와 입자 등이 혼합된 복합적인 폐수 성상이 나타나는 경우가 많습니다. 반면 순수 분진 처리 설비(입자 분리기)​에서는 입자가 다량 함유된 폐수가 발생하며, 소량의 염류가 포함될 수도 있습니다.",{"type":230,"children":850},[851],{"type":233,"value":852},"가장 기본적인 폐수 처리 방법은 다른 수질 항목을 함께 고려하면서 입자를 선택적으로 제거하는 것입니다. 처리된 폐수는 이후 폐가스 처리 시스템으로 다시 공급하여 재이용할 수 있으며, 순환 과정에서 용존 물질이 일정 수준까지 축적될 때까지 이러한 순환을 지속할 수 있습니다.",{"type":230,"children":854},[855],{"type":233,"value":856},"한계값에 도달하면 공정 장애를 방지하기 위해 재이용수를 교체해야 합니다. 이처럼 한계값에 도달하기 전까지 처리수를 반복적으로 재이용함으로써 최대 90%의 물 사용량을 절감할 수 있습니다.",{"type":230,"children":858},[859],{"type":233,"value":860},"물 순환 과정에서 발생하는 손실분은 담수로 보충합니다. 이를 통해 물에 포함된 용존 물질의 농도를 동시에 희석하고, 전체적인 물 재이용률을 높일 수 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